Have you completed your measures against fluorocarbons? 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas - Ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan for the drive unit ■ Reduces noise and vibration

Chiller