It can be attached to existing microscopes for micro laser marking and micro laser processing.
- Can be attached to existing microscopes. - Marking on various materials with minimal wavelength dependence. - Minimum laser spot size of approximately 0.3 µm. - Marking is also possible on materials beneath transparent bodies or within transparent bodies. - Target marking as a preprocessing step for SEM, AFM, and FIB. By combining with an automatic stage and dedicated software, it is also possible to mark rectangles and characters. Additionally, marking can be done while reviewing defect maps from defect inspection devices such as KLA.
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basic information
- A small spot approximating the diffraction limit can be obtained. (Below 0.3μm when using 100X objective) - Laser irradiation is possible while observing visually through the eyepiece. - Selective excision in the depth direction of the sample is possible. - Due to the fiber connection method, installation and movement can be easily performed. - A diode laser is used, and the wavelength can be changed according to the purpose. (Selectable range: 365nm to 900nm) - Pulse energy is over 50μJ, and pulse width is 2-6 nsec. - Beam alignment and power adjustment can be easily performed.
Price information
The standard combination ranges from 5 million yen to 6 million yen and may vary depending on the installation microscope and purpose. Please feel free to contact us.
Price range
P6
Delivery Time
※Approximately 2 months after order receipt (immediate delivery possible depending on circumstances).
Applications/Examples of results
- Marking around micro-defects and particles on the silicon wafer. - Marking internally while observing the back side of SiC (silicon carbide). - Marking on the aluminum pattern under the glass. - Marking as a reference for FIB cutting. - Marking around foreign substances within the resin lens. - Cutting of bonding wires. - Cutting of Cu patterns. - Delamination of ITO film. - Delamination of gold vapor-deposited film on glass. There are other items as well.
Detailed information
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MicroPoint Can mark on various materials such as wafers, glass, and resin.
Company information
We import and sell high-quality optical devices and inspection equipment from overseas. Additionally, we can build custom-made systems tailored to our customers' needs. Please feel free to consult with us.
![[Cleaning Production Case] Production Management through Laser Marking](https://image.mono.ipros.com/public/product/image/390/2000279626/IPROS8153273758946493306.png?w=280&h=280)
![Free test campaign for laser marking underway [with benefits!]](https://image.mono.ipros.com/public/product/image/452/2000507011/IPROS45067608240422863008.gif?w=280&h=280)
