Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.
The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Lineup】 ■SDL12E50 ■SDL20E50 ■SDL36E60 ■SDL3600 *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its establishment in 1946, Kashiyama Industries has steadily evolved while expanding its business scope in response to various needs of the times, with the motto of "Customer First." In particular, regarding pumps, we have mastered vacuum technology that supports cutting-edge fields of modern industry based on fluid research and technology, supplying vacuum pumps and vacuum equipment to various advanced sectors, primarily in the semiconductor industry. We also developed Japan's first snow machine, which received tremendous acclaim from ski resort stakeholders. To further respond to the trust we have gained, we contribute to the development of the ski resort industry by providing comprehensive support from planning to development and operation during the renewal and new openings of ski resorts. Our technical capabilities, planning skills, production capacity, and the collective agility of our entire company to realize customer needs can be described as the physical strength of the enterprise. We continuously accumulate and refine this power. Kashiyama Industries will continue to uphold the principle of customer-first and respond to increasingly sophisticated and diverse needs with flexible thinking. Please feel free to contact us.
