樫山工業 Product Lineup

Unique-shaped vertical screw Achieves compatibility with a wide range of processes due to high corrosion resistance from special materials and a rich variety of temperature options Revamped appearance and space-saving design! 【Specifications】 ■ Inheritance and evolution of process resistance ■ Low power consumption ■ Space-saving footprint ■ Compliant with SENI/CE/NRTL standards *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

Process resistance and energy-saving performance have further evolved! Revamped appearance and space-saving design! 【Specifications】 ■ Inheritance and evolution of process resistance ■ Low power consumption ■ One of the world's smallest class space-saving footprints ■ Compliant with SENI/CE/NRTL standards *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

Regular maintenance achieves a long life of once every six years! We have released the G series, which features a completely redesigned design compared to the NeoDry-E series, with enhanced quiet performance and steam processing capability! 【Features】 〇 Wide power supply specifications that can be used with both 100V and 200V 〇 Noise reduction 〇 Increased steam processing capacity! 〇 Equipped with IEC power connector! 〇 Standard compliance with harmonic regulations! 〇 Equipped with serial communication function! ● For more features and details, please download the catalog.

• Vacuum pump
• Scanning Electron Microscope
• Electron microscope

The "MU-PE/HE Series" is a roots-type dry vacuum pump that can be used for a wide range of applications, from light loads to etching. The MU-HE series features HOT-N2 purging (optional). 【Specifications】 ■ Process resistance ■ Power consumption: 0.6 kW *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump
• Vacuum Equipment

The "MU-XE Series" is a roots-type dry vacuum pump that achieves the world's best energy efficiency and footprint in its class. It can be integrated into various manufacturing equipment and is ideal for clean exhaust process applications such as load locks and transport chambers. 【Specifications】 ■ Power consumption: 0.25 kW ■ Size: 230×450 mm (A3 or smaller) *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump
• others

The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump
• others

The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump
• others

Regular maintenance achieves a maintenance cycle of once every six years. A dry vacuum pump with air cooling that pursues a reduction in total costs. 【Features】 ○ No contact parts in the pumping section, ensuring no performance degradation over long-term use. ○ No oil mist generation or contamination of the vacuum chamber, similar to rotary pumps. ○ Adopts an air cooling method, eliminating the need for cooling water, allowing for flexible installation. ○ Capable of exhausting water vapor due to the adoption of a gas ballast mechanism. ● For other functions and details, please download the catalog.

• Other laboratory equipment and containers
• Other pumps
• Vacuum pump

Water-sealed vacuum pump ideal for exhaust of gases containing water vapor and droplets 【Features】 ○ Capable of exhausting flammable and corrosive gases ○ Few friction parts and no failures, allowing for continuous operation ○ Low noise and minimal vibration ○ Continuous exhaust with no pulsation ○ Uses mechanical seals for shaft sealing, making maintenance easy ○ All models are of the Elmo type, achieving better efficiency and pressure than traditional Nash types ○ Built-in constant flow valve adopting an appropriate water supply method ○ LEH type is a two-stage pump for high vacuum applications LEM type is a direct-coupled pump that is compact and lightweight ● For other functions and details, please download the catalog.

• Other pumps
• Vacuum pump