Plasma Etcher Chiller NIKOLA3K/5K

High cooling capacity Peltier chiller without refrigerant gas - perfect for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with major etcher manufacturers' products! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

Chiller