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  6. Significant reduction in power consumption! Peltier chiller 'NIKOLA3K/5K'

Significant reduction in power consumption! Peltier chiller 'NIKOLA3K/5K'

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last updated:Mar 04, 2022

エムエス機器
エムエス機器
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High cooling capacity Peltier chiller without refrigerant gas - Ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

    Chiller
図1.jpg

Significant reduction in power consumption! Peltier chiller 'NIKOLA3K/5K'

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図1.jpg
  • Related Link - https://www.technosaurus.co.jp/products/nikola-ser…

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basic information

【Basic Specifications】 Temperature Range: -10℃ to 80℃ Cooling Capacity: NIKOLA3K: 3000W @ 20℃ NIKOLA5K: 5000W @ 20℃ Heating Capacity: 2000W @ 25℃ Tank: 10L Contact Parts Material: Aluminum, Stainless Steel, Polymer External Dimensions: W566 × D711 × H887 (mm) *For more details, please refer to the catalog. Feel free to contact us as well.

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Applications/Examples of results

- Adopted for a 300mm plasma etching device. - Ideal for temperature control around the plasma of dry etching devices.

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ThermoRack 1201

ThermoRack 1201

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Peltier Chiller NIKOLA 3K / 5K

Peltier Chiller NIKOLA 3K / 5K

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ThermoRack 1801

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エムエス機器

エムエス機器

Industrial Machinery

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MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892

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