CMP material development, ideal for research and development! It is a tabletop CMP experimental device that allows you to conduct research and development conveniently.
【Product PR】 Kemet Japan's "BC-15" is a versatile tabletop experimental device that can be widely used for CMP material development, material screening, and device development. The platen diameter is 15 inches, and the platen rotation speed ranges from 5 to 100 RPM. The maximum workpiece diameter is φ152mm. It can accommodate chip sizes up to φ6-inch wafer sizes. 【Features】 ◆ The underside of the base plate has magnets, making it easy to attach and detach. ◆ It is equipped with a touch panel. ◆ It can operate automatically; once set, you only need to press start to begin processing.
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basic information
【Specifications】 ■ Base plate diameter: 15 inches (φ380mm) ■ Base plate rotation speed: 5–100 RPM ■ Grinding head diameter: φ180mm ■ Grinding head rotation speed: 5–95 RPM ■ Maximum workpiece diameter: φ152mm ■ Grinding head pressure mechanism: Air cylinder ■ Maximum pressure on grinding head: 25kgf ■ Device weight: Approximately 135kg ■ Device dimensions: D600×W850×H800 ■ Power supply: Three-phase 220V *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Company information
Kitagawa Gresstech Co., Ltd. was established through the merger of System Seiko Co., Ltd. and Kemet Japan Co., Ltd. By combining the technology cultivated by System Seiko in HDD polishing equipment with the know-how developed by Kemet Japan in polishing consumables and contract processing for semiconductors and electronic components, we aim to strengthen our sales and development capabilities and further expand our business.
