Achieving low-cost, space-saving, and high-speed appearance inspection! AI-equipped wafer appearance inspection equipment.
The "Cosmo Finder" is a device that achieves high-speed and high-precision appearance inspection of wafers using a microscope and image processing. With over 30 years of experience in image processing software development, we have incorporated many customer requests, enabling us to recognize various defects. It also demonstrates its effectiveness in detecting foreign objects and scratches that have been difficult to identify until now. Additionally, the main unit integrates an optical unit, a drive unit, an image processing unit, and a control unit, achieving high performance in a compact design. It can be utilized in various scenarios, from manufacturing processes to R&D departments. 【Features】 ■ Space-saving design ■ Over 30 years of experience in image analysis ensures high-precision inspection ■ AI-based classification technology supports problem-solving ■ Various optional features available *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Measurement target wafers: Bare, patterned, coated ■Wafer size: 2 inches to 8 inches ■Inspection items ・Foreign matter, cracks, size (OK, NG judgment) ・Luminance unevenness, disconnection, pattern recognition (OK, NG judgment) ・Dimensions (holes, major and minor diameters) ■Detection method ・Microscopic image processing method (high-speed pattern matching, AI classification, luminance extraction) ■Detection time: Approximately 10 minutes/wafer (for 6-inch wafer, resolution of 0.69um) ■Detection sensitivity: Approximately 2um or more ■Camera: 2/3 inch 5-megapixel CMOS camera ■Light source: White LED ■Auto-focus: Laser triangulation type, focusing time under 100 msec ■Device dimensions: W635 H1355 D998 (mm) ■Device weight: Approximately 130kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We specialize in application development utilizing image processing technology, and we have accumulated numerous achievements, particularly in the measurement field. We develop and sell packaged products such as the image analysis software WinROOF, which has a cumulative sales record of over 10,000 units, and we also offer custom development tailored to our customers' needs, providing a wide range of solutions to address their challenges. In addition to software, we also create automation devices that combine hardware.