Automating visual inspection of wafer defects.
■This is a device that responds to the following requests and concerns! - We want to automate visual inspection of defects on wafers (substrates). - We want to reduce and prevent variability in pass/fail judgments among inspectors. - We want to save inspection data and trace quality. - We want to automatically discriminate defects. ■Features of the device - It can automatically detect, extract, and discriminate visually identifiable defects. - We can propose an optical system optimized for the types of defects. - We can suggest both manual and automatic transport (cassette to cassette). - It also implements AI functions, allowing for improved defect discrimination accuracy through ongoing learning.
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【Minimum Detectable Defect】 30um 【Target Shape】 Circular: Diameter less than 200mm Rectangular: Less than 140mm□ *If you would like to measure sizes larger than the above, please consult us. 【Inspection Time】 100 PPH
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Kubota has supported a rich society and the circulation of nature by addressing issues related to food, water, and the environment, which are essential for human survival. The Kubota Precision Equipment Business Unit and Kubota Instrumentation provide solutions based on "measurement and metrology technology" that meet the demands of various industries for automation, labor saving, high-precision measurement and control, and data processing, contributing to the development of society.
