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  6. Fluororesin diaphragm valve for high durability/high purity fluids

Fluororesin diaphragm valve for high durability/high purity fluids

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GEMÜ iComLine C50/C51/C57

last updated:May 01, 2026

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It is a robust fluororesin diaphragm valve with minimal dead space and strong resistance to back pressure.

This is a fluororesin diaphragm valve (diaphragm valve) for chemical piping in semiconductor manufacturing equipment and chemical plants. It is compact and has high durability, capable of withstanding over 5 million open and close cycles. The flow path is smooth with a structure that minimizes dead space. It has a built-in auxiliary spring, which maintains sealing performance by pressing the diaphragm even if the resin deforms in low-temperature environments. It can also be manufactured with a maximum operating temperature specification of 180°C.

    valve
図2.png

Fluororesin diaphragm valve for high durability/high purity fluids

図2.png
図2.png manifold.png C50_8_D_NX_SP_5_1_2A1_HPW.png C51_AG0.png C57_8_D_PL_30_5_0_2A1_HPW.png
  • Related Link - https://www.gemu-group.com/ja_JP/ventiltechnik/mem…
  • Special site - Product/service details - https://pr.mono.ipros.com/gemu-group/product/

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basic information

- Maintenance-free PVDF piston actuator - Standard equipped with seal adjuster and position indicator 【Size】1/4" to 1-1/4" 【Applicable fluids】Corrosive and inert gases and liquids 【Fluid temperature】-10 to 180℃ 【Operating pressure】Max 0.6MPa 【Ambient temperature】Max 60℃ 【Body material】PTFE, PFA 【Diaphragm material】PTFE 【Connection】Flare, pillar, nanolink, prime lock 【Operation】Manual, normally closed, normally open

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Applications/Examples of results

- Supply and transportation of high-purity chemicals for LED and integrated circuit manufacturing - Chemical supply in the wet process of semiconductor manufacturing - Precise dosing of chemicals - Chemical injection process in wastewater treatment systems

Detailed information

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High-purity chemicals and component and system solutions for semiconductor manufacturing processes.

High-purity chemicals and component and system solutions for semiconductor manufacturing processes.

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GEMÜ (GEMU) Semiconductor: Solutions for microelectronics, semiconductors, and lithium-ion battery manufacturing processes.

GEMÜ (GEMU) Semiconductor: Solutions for microelectronics, semiconductors, and lithium-ion battery manufacturing processes.

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GEMÜ Guide Book for General Industry

GEMÜ Guide Book for General Industry

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[Online Exhibition 3/8-3/10] Invitation to Exhibit at the Future of Japanese Manufacturing Exhibition

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From March 8 to 10, 2021, we will be exhibiting at the "Future of Japanese Manufacturing" exhibition. Once called a "manufacturing powerhouse," the Japanese manufacturing industry is now facing a crisis due to delays in digital transformation (DX) and other factors, bringing together technologies that will have a significant impact. Mr. Akira Ikegami and Mr. Wang, the chairman of HUAWEI, will also be speakers at the event. This is an opportunity to think together about the "future" of Japanese manufacturing! We look forward to your visit.

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Machine elements and parts

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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.

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