High vacuum cylinder valve capable of full conductance.
Valves for exhaust and venting in high vacuum applications that require high conductance - Capable of withstanding harsh environments (high resistance to corrosion). - A perforated cylinder rotates, allowing for full conductance. - A rotating structure that hides the O-ring within the valve body. Protects the O-ring from corrosive gases, ensuring a long lifespan!
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basic information
Features 1. Mechanical lock in open and closed positions 2. Low particle generation 3. Minimal friction due to no metal-to-metal contact, with O-rings 4. No moving parts
Price information
Consultation required.
Delivery Time
※Consultation required
Applications/Examples of results
In an environment using NF3 gas for cleaning the plasma CVD chamber: 1. The aluminum body material exhibits excellent corrosion resistance to NF3 gas. 2. The gate mounting screws/washers/shafts, which are part of the vacuum section, are coated with Ni-PTFE to further enhance process stability. 3. Depending on the process, the use of other sealing materials is recommended (such as FFKM instead of FKM).
Line up（18）
| Model number | overview |
|---|---|
| 25024-KA14 | No limit switch |
| 25028-KA14 | No limit switch |
| 25032-KA14 | No limit switch |
| 25024-KA24 | With limit switch |
| 25028-KA24 | With limit switch |
| 25032-KA24 | With limit switch |
| 25124-KA14 | No limit switch |
| 25128-KA14 | No limit switch |
| 25132-KA14 | No limit switch |
| 25124-KA24 | With limit switch |
| 25128-KA24 | With limit switch |
| 25132-KA24 | With limit switch |
| 25224-EA14 | No limit switch |
| 25228-EA14 | No limit switch |
| 25232-EA14 | No limit switch |
| 25224-EA24 | With limit switch |
| 25228-EA24 | With limit switch |
| 25232-EA24 | With limit switch |
catalog（1）
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.