Oscillator-type valve control system Series 65.0

basic information

Size: DN 100 – 400 mm (4“ – 16“) Actuator: Mounted controller Body material Aluminum: No surface treatment or hard anodized finish Shaft seal: Rotating shaft seal Standard flange: ISO-F, JIS Leak rate Valve body Aluminum: < 1 × 10-9 mbar ls-1 Aluminum, hard anodized: < 1 × 10-5 mbar ls-1 Leak rate Valve seat Aluminum: < 1 × 10-9 mbar ls-1 Aluminum, hard anodized: < 1 × 10-4 mbar ls-1 Operating pressure range Aluminum: < 1 × 10-8 mbar to 1.2 bar (abs) Aluminum, hard anodized: < 1 × 10-6 mbar to 1.2 bar (abs) Number of cycles until first service Pressure control: One million cycles Open/Close: 200,000 Shaft seal Actuator: Rotating shaft seal Sealing ring: O-ring shaft seal

Price information

Consultation required.

Delivery Time

※Consultation needed.

Applications/Examples of results

SEMI, downstream pressure control for FPD processes and vacuum sealing valves.

Line up（26）