Vacuum shut-off valve for pumps/chambers that can be used in semiconductor and surface analysis applications.
- Low particle generation - Easy maintenance - Low cost
Inquire About This Product
basic information
Size: DN10-100mm (⅜“ – 4“) Actuator: Pneumatic single-acting cylinder with spring return, or double-acting cylinder Body Material: Aluminum or stainless steel Shaft Seal: Bellows Standard Flange: ISO-KF, ISO-F, CF-F Vacuum Level: HV, UHV
Price information
Consultation needed.
Delivery Time
※Consultation needed.
Applications/Examples of results
The main applications are surface analysis/vacuum isolation for semiconductor manufacturing equipment.
catalog（1）
Download All Catalogs
Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.