Unmatched high field of view and high resolution interference-type 3D laser scanning microscope.

An interference-type 3D laser scanning microscope that achieves unparalleled high field of view and high resolution (field of view: 30x50 mm; resolution: 50 nm).

First Interferometric Measurement Using Laser Scanning Interference fringes appear with a reflection similar to that of glossy paper. It captures changes of 50 nm with interference fringes. ● Inverted Laser Scanning Interferometer (Model: LSMi-7000) By placing the sample on a glass surface, interference fringe measurement can be easily performed. Scanning range is 30 mm × 50 mm, and it can be observed in an enlarged view on the monitor. It can inspect fine scratches, polishing defects, and chipping on ceramics and other materials. Interference fringe analysis software is optional. ● Cylindrical Laser Scanning Interferometer (Model: LSMi-7500) Interference fringes can be observed over the entire surface of the cylinder, allowing for precise inspection of the cylinder. ● Upright Laser Scanning Interferometer (Model: LSMi-8000) Enables non-contact measurement of fine interference fringes. Interchangeable lenses include 5 mm, 10 mm, and 26 mm scanning lenses, with custom options available. Can also be used as a standard confocal laser scanning imager. Devices Developed from These Applications Ultra-wide field confocal type, high resolution 1 μm 3D laser scanning imager Can measure 3D shapes within a range of 5 × 50 mm. ● Capable of measuring shapes with inclinations up to 45 degrees. ● Can also detect defects such as scratches and deep holes. ● Shape measurement and image acquisition of cylindrical surfaces are also possible.

Laser microscope