High-precision ion gauge head with an X-ray limit of 10^-12 Pa! Ultra-high vacuum gauge.
The "3B-Gauge" is a new type of measuring device that comprehensively improves the three measurement limits of soft X-rays, electron impact desorption (ESD), and gas release present in thermal cathode ionization vacuum gauges, enabling pressure measurements down to the 10^-12 Pa range. The electrodes are embedded within a conflated flange (ICF70) made of ultra-low gas release vacuum structural material, a 0.2% BeCu alloy, to achieve low gas release. 【Features】 ■ Comprehensive improvement of the three measurement limits ■ Capable of measuring pressures down to the 10^-12 Pa range ■ Achieves low gas release ■ Flange material: 0.2% BeCu alloy (appearance NiP plated) ■ Current introduction terminals: SUS304, Kovar vacuum terminals *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Electron energy: 120 eV ■ Filament voltage: 100 V ■ Filament heating current/voltage = 1.5 A / 3.0 V ■ E-Beam degassing power = 480 V × 10–30 mA ■ Electron current = 1–4 mA (up to 10 mA possible) ■ Deflection electrode voltage = 155 V (deflector) ■ X-ray limit = approximately 5 × 10^-12 Pa ■ Baking temperature: up to 280 °C *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
