Valves for optimal pressure control in high-speed and advanced processes such as CVD.
- Excellent pressure control capability - Automatic detection of service timing (contamination detection) - Equipped with service port (for PC connection or service box connection) - Excellent adaptability to processes with high contamination levels
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basic information
Size: DN25-320mm (1" – 12") Actuator: Mounted controller Body material: Aluminum or stainless steel Shaft seal: Rotating shaft seal Standard flange: ISO-KF, ISO-F Leak rate: Valve body < 1 × 10 -9 mbar ls -1 Operating pressure range: 1 × 10 -8 mbar to 1.2 bar (abs) Number of cycles until first service: Two million cycles Mounting direction: Free (shaft mounting on the pump side is recommended)
Price information
Consultation required.
Delivery Time
※Consultation required.
Applications/Examples of results
Pressure control valves for the SEMI, FPD, PV, and SOLAR industrial sectors. Particularly suitable for high-speed and advanced processes, e.g., CVD.
Line up（18）
| Model number | overview |
|---|---|
| 61228-KAGG | DN25 ISO-KF Aluminum |
| 61232-KAGG | DN40 ISO-KF Aluminum |
| 61234-KAGG | DN50 ISO-KF Aluminum |
| 61236-PAGG | DN63 ISO-F Aluminum |
| 61238-PAGG | DN80 ISO-F Aluminum |
| 61240-PAGG | DN100 ISO-F Aluminum |
| 61244-PAGG | DN160 ISO-F Aluminum |
| 61246-PAGG | DN200 ISO-F Aluminum |
| 61248-PAGG | DN250 ISO-F Aluminum |
| 61228-KEGG | DN25 ISO-KF Stainless Steel |
| 61232-KEGG | DN40 ISO-KF Stainless Steel |
| 61234-KEGG | DN50 ISO-KF Stainless Steel |
| 61236-PEGG | DN63 ISO-F Stainless Steel |
| 61238-PEGG | DN80 ISO-F Stainless Steel |
| 61240-PEGG | DN100 ISO-F Stainless Steel |
| 61244-PEGG | DN160 ISO-F Stainless Steel |
| 61246-PEGG | DN200 ISO-F Stainless Steel |
| 61248-PEGG | DN250 ISO-F Stainless Steel |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.