Control valve optimal for particularly harsh etching and cleaning processes.
- High-speed, particle-free, shock-free operation - Extremely short control response time - Equipped with a service port (for PC connection or service BOX2 connection)
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basic information
Size: DN 100 – 400 mm (4“ – 16“) Actuator: Mounted controller Body material Aluminum: No surface treatment or hard anodized finish Shaft seal: Rotating shaft seal Standard flange: ISO-F, JIS Leak rate Valve body Aluminum: < 1 × 10-9 mbar ls-1 Aluminum, hard anodized: < 1 × 10-5 mbar ls-1 Leak rate Valve seat Aluminum: < 1 × 10-9 mbar ls-1 Aluminum, hard anodized: < 1 × 10-4 mbar ls-1 Operating pressure range Aluminum: < 1 × 10-8 mbar to 1.2 bar (abs) Aluminum, hard anodized: < 1 × 10-6 mbar to 1.2 bar (abs) Number of cycles until first service Pressure control: One million cycles Open/Close: 200,000 Shaft seal Actuator: Rotating shaft seal Sealing ring: O-ring shaft seal
Price information
Consultation required.
Delivery Time
※Consultation needed.
Applications/Examples of results
SEMI, downstream pressure control for FPD processes and vacuum sealing valves.
Line up（26）
| Model number | overview |
|---|---|
| 65040-PAGG | DN100 ISO-F Aluminum |
| 65044-PAGG | DN160 ISO-F Aluminum |
| 65046-PAGG | DN200 ISO-F Aluminum |
| 65048-PAGG | DN250 ISO-F Aluminum |
| 65050-PAGG | DN320 ISO-F Aluminum |
| 65052-PAGG | DN400 ISO-F Aluminum |
| 65040-JAGG | DN100 JIS Maintenance Flange Aluminum |
| 65044-JAGG | DN160 JIS Maintenance Flange Aluminum |
| 65046-JAGG | DN200 JIS Maintenance Flange Aluminum |
| 65048-JAGG | DN250 JIS Maintenance Flange Aluminum |
| 65050-JAGG | DN320 JIS Maintenance Flange Aluminum |
| 65051-JAGG | DN350 JIS Maintenance Flange Aluminum |
| 65052-JAGG | DN400 JIS Maintenance Flange Aluminum |
| 65040-PHGG | DN100 ISO-F Aluminum, Hard Anodized |
| 65044-PHGG | DN160 ISO-F Aluminum, Hard Anodized |
| 65046-PHGG | DN200 ISO-F Aluminum, Hard Anodized |
| 65048-PHGG | DN250 ISO-F Aluminum, Hard Anodized |
| 65050-PHGG | DN320 ISO-F Aluminum, Hard Anodized |
| 65052-PHGG | DN400 ISO-F Aluminum, Hard Anodized |
| 65040-JHGG | DN100 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65044-JHGG | DN160 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65046-JHGG | DN200 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65048-JHGG | DN250 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65050-JHGG | DN320 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65051-JHGG | DN350 JIS Maintenance Flange Aluminum, Hard Anodized |
| 65052-JHGG | DN400 JIS Maintenance Flange Aluminum, Hard Anodized |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.