Compact vacuum sealing valve
- Minimal vibration and particle generation during valve opening and closing - Easy and quick maintenance due to the split body structure - No adjustment needed after disassembly and cleaning
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basic information
Size: DN 200-550mm (8“ – 22“) Actuator Pneumatic operation: Single-acting cylinder, closing action is spring (NC) 3-position pneumatic operation: Single-acting cylinder, closing action is spring (NC) Body material: Aluminum Shaft seal: Rotary shaft seal Standard flange: ISO-F, ASA-LP, JIS Leak rate Valve body, valve seat: < 1 × 10-9 mbar ls-1 Operating pressure range: 1 × 10-8 mbar to 1.2 bar (abs) Maximum allowable differential pressure on the plate: ≤ 1.2 bar Maximum allowable differential pressure when opening the valve DN 200: ≤ 10 mbar DN 250-500: ≤ 5 mbar Number of cycles until first service: 200,000 Heating and cooling rate: ≤ 30 °C h-1 Shaft seal: Rotary shaft seal Solenoid valve: 24 V DC, 5.4 W (for others, please inquire)
Price information
Consultation required
Delivery Time
※Consultation required.
Applications/Examples of results
For high vacuum applications
Line up（18）
| Model number | overview |
|---|---|
| 16236-PA21/JA21/TA21 | DN63 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16240-PA21/JA21/TA21 | DN100 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16244-PA21/JA21/TA21 | DN160 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16246-PA21/JA21/TA21 | DN200 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16248-PA21/JA21/TA21 | DN250 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16250-PA21/JA21/TA21 | DN320 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16251-JA21/TA21 | DN350 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16252-PA21/JA21/TA21 | DN400 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16254-PA21/JA21/TA21 | DN500 ISO-F/JIS maintenance flange/ASA-LP; Pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16236-PA28/JA28/TA28 | DN63 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16240-PA28/JA28/TA28 | DN100 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16244-PA28/JA28/TA28 | DN160 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16246-PA28/JA28/TA28 | DN200 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16248-PA28/JA28/TA28 | DN250 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16250-PA28/JA28/TA28 | DN320 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16251-JA28/TA28 | DN350 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16252-PA28/JA28/TA28 | DN400 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
| 16254-PA28/JA28/TA28 | DN500 ISO-F/JIS maintenance flange/ASA-LP; 3-position pneumatic actuator - single-acting cylinder, closing action is spring (NC), no solenoid valve, with limit switch |
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Company information
VAT is an innovation company that provides mission-critical solutions for cutting-edge research and development and manufacturing processes in fields requiring vacuum, such as semiconductor and display manufacturing, as well as solar panel research and development. Innovation and exceptional engineering drive VAT's technology solutions and services. The products and services offered by VAT are highly customized. This reflects VAT's strong commitment to providing uncompromising solutions to its customers. Since its founding in Switzerland, VAT has established a leading position in the world by developing and providing innovative solutions in vacuum valves and related technologies in the global market, including Japan, over the past 60 years.