High-sensitivity analyzer for bulk process gas analysis based on FTIR!
"MultiGas TM Purity" is an FTIR-based analyzer capable of detecting ppb-level impurities in high-purity bulk process gases. It excels in identifying impurities in bulk gases with high-resolution analysis. 【Features】 ■ Proven contribution to quality improvement in bulk gas manufacturing with gases such as NF3, NH3, and H2 ■ Configuration that accommodates corrosive high-purity gases ・Sample line and gas cell are made of welded 316SS ・Adopts a heated optical path to reduce contaminants from moisture and the atmosphere *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Dimensions: 444.5W × 317.5H × 648D mm ■Weight: 57kg ■Required Power Supply: 120/240VAC, 6A ■Scan Time: 1 to 300 seconds *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is a global leading company that provides the latest technologies in manufacturing processes for growth industries, including thin film applications such as semiconductor devices, FPD, OLED, solar cells, data storage, and coatings, as well as industrial applications such as medical devices, energy, environmental monitoring, and biopharmaceuticals. We offer worldwide support from service centers located around the globe.
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