Automatically map defects (scratches, foreign objects) at the submicron level.
The automatic visual inspection device that we handle is a device for inspecting defects in various materials such as film and glass. It can detect a variety of defects including scratches, foreign objects, and pinholes. The detected defects are mapped, and by simply clicking on their positions with a mouse, you can observe microscope images. It also supports the inspection of roll film ends that were previously done visually. 【Features】 ■ Performs automatic mapping to obtain positional information of scratches and foreign objects at the sub-micron level ■ Conducts detailed inspections of each scratch and foreign object based on the positional information from the mapping data ■ Enables a variety of inspections including transmission/reflection, bright/dark field, polarization, and differential interference observation ■ Has a significant track record of inspecting defects that were previously difficult to assess ■ Visualizes defects and unevenness that were challenging to detect through visual inspection, enabling simplified inspections (Unevenness Viewer) *For more details, please download the PDF or feel free to contact us.
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【Inspection Target Examples】 ■ Inspection of defects that became issues during inline processes ■ Inspection of defects that cannot be addressed through inline inspection ■ Inspection of defects that have been visually inspected until now ■ Inspection of pinholes and scratches in thin films ■ Inspection and measurement of transparent electrode patterns ■ Inspection of scratches and foreign substances on Si and sapphire wafers, as well as peripheral inspection ■ Inspection of abnormalities on crystal film formation surfaces *For more details, please download the PDF or feel free to contact us.
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Aigate Corporation introduces research and development equipment related to electronic devices. Through partnerships with many equipment manufacturers, we can flexibly accommodate customization of equipment necessary for research and development, as well as new designs. Please feel free to contact us if you have any requests.