Thorough cleaning performance, reliable design! 45nm clean technology.
The "TAS300 Type-4E" is a FOUP load port designed with thorough equipment cleanliness and non-contact operation for wiring and piping during operation. It minimizes the generation of microscopic particles to the extreme. In PWP testing, it has achieved world-class levels. Additionally, a unique mechanism that accommodates minute differences (tolerances) for each FOUP prevents collisions between the FOUP and the load port, ensuring secure latch key insertion and achieving high compatibility. 【Features】 ■ Achieves the highest level of cleanliness in the industry ■ High compatibility with various manufacturers' FOUPs ■ Improved maintainability ■ High reliability and durability *For more details, please download the PDF or contact us.
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basic information
【Specifications】 ■ Target FOUP ・ 300mm FOUP (for 25 wafers) ・ Compliant with SEMI E47.1 and E62 ■ FOUP Clamp ・ Kinematic pin positioning ・ Uses Front Retaining Feature (air-driven) ■ FOUP Door Fixing: Vacuum suction, etc. *For more details, please download the PDF or contact us.
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Company information
TDK Corporation is a company that primarily develops and commercializes devices such as magnetic heads, magnets, power supplies, and batteries. Our main products are passive components, including ferrite cores, coils, transformers, ceramic capacitors, and sensors, which are fundamental components used in all electrical and electronic devices. Currently, we are engaged in product development and commercialization based on the technologies and know-how we have accumulated and refined in these areas.
