Optimal temperature control for spin coaters - Precision air conditioning unit PAU series

Simply place and connect to easily achieve precise air conditioning. The Apiste PAU series of precision air conditioning units allows for flexible temperature control in enclosed spaces.

【Optimal for Temperature Control of Spin Coaters】 Apiste's Precision Air Conditioning Unit PAU Series When temperature and humidity are not managed, the viscosity of the coating solution fluctuates, leading to changes in diffusion speed and adhesion, resulting in variations in film thickness. It is necessary to keep the ambient temperature and humidity constant to prevent changes in the viscosity of the coating solution. By managing temperature and humidity with the precision air conditioning unit PAU series, it contributes to improved yield. ------------------------------------------------ The 'PAU Series' for localized air conditioning can reduce energy consumption compared to overall air conditioning, enabling not only high-precision temperature management but also precise control of humidity, ranging from low-humidity to high-humidity environments as needed. Additionally, by combining with a fan filter unit, it is possible to easily achieve a wide range of cleanliness management. 【Features of the Precision Air Conditioning Unit】 ■ Temperature Control ±0.1℃ ■ Humidity Control ±0.5% RH ■ Cleanliness Control Class 100 to Class 10000 ■ Flexible response to changes in manufacturing line specifications and layouts

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