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  6. NM Ultrasonic Motor (Piezo Motor) 'SE Motor'

NM Ultrasonic Motor (Piezo Motor) 'SE Motor'

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last updated:Jun 14, 2024

工苑
工苑
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With a driving force of 32N, the maximum speed is 500mm/sec! Power consumption is half that of conventional products.

The "SE Motor" expands its product line based on the extensive experience of NanoMotion Inc. in the fields of measurement, semiconductors, optics, and defense with ultrasonic motors (piezo motors). It is designed based on an expanded motor structure that incorporates a more efficient drive core to achieve high rigidity, high-speed drive, and sub-nanometer motion resolution. Compared to NanoMotion's existing "HR Motor," this product offers double the speed with the same driving force while consuming half the power. 【Features】 ■ High vacuum applications ■ Sub-nanometer positioning accuracy ■ Excellent energy conversion efficiency ■ Wide dynamic speed range ■ Zero backlash and high rigidity *For more details, please refer to the PDF document or feel free to contact us.

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NM Ultrasonic Motor (Piezo Motor) 'SE Motor'

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  • Related Link - https://www.koenn.co.jp/nano/SE.html

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【Other Features】 ■Static holding force without power ■Quiet operating sound ■Quiet operating sound OEM (electromagnetic interference) can be ignored *For more details, please refer to the PDF document or feel free to contact us.

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Ultrasonic Motor "SE Motor"

Ultrasonic Motor "SE Motor"

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Ultrasonic Motor "HR Series"

Ultrasonic Motor "HR Series"

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Standard stage optimized for HR motors.

Standard stage optimized for HR motors.

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Nano Motion: A clean and stable 1nm motion system.

Nano Motion: A clean and stable 1nm motion system.

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News about this product(3)

SEMICON_2023_KOENN

Notice of Participation in SEMICON Japan 2023【Kouen】

  • Seminar・Event

Kouen will be exhibiting at "SEMICON Japan 2023" held at Tokyo Big Sight. At this exhibition, we will showcase and demonstrate ultrasonic motors from Nanomotion, which achieve both high-speed movement and precise positioning, along with stage systems that utilize these motors. These are ideal for stages incorporated into semiconductor manufacturing and inspection equipment. In addition to ultrasonic motors, we also offer consultations on the design and manufacturing of stages that can shorten development time. Please take a look at the ultrasonic motors (piezo motors) from Nanomotion, which has over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments, along with the range of stage products equipped with them. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) ■ 4-axis stage for ion beam ■ 5-axis stage for light sheet microscopy (Demo available) If you plan to attend, please register in advance using the link below.

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JASIS2023_KOENN

Notice of Participation in 'JASIS 2023' from September 6 (Wednesday) to September 8 (Friday), 2023

  • Seminar・Event

We will be exhibiting at the "JASIS 2023 Advanced Science and Analysis Systems & Solutions Exhibition" held at Makuhari Messe from September 6 (Wednesday) to September 8 (Friday), 2023. At this exhibition, we will primarily showcase our high-precision positioning stage driven by ultrasonic motors. The ultrasonic motors (piezo motors) from our manufacturer, Nanomotion, have over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments. We will also demonstrate domestically produced optical shutters. 【Exhibited Products】 ■ Ultrasonic Motor (Piezo Motor) "SE Motor" ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (with demonstration) ■ Optical Shutter (with demonstration) We sincerely look forward to your visit.

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SEMICON_2022_KOENN

Notice of participation in "SEMICON Japan 2022" from December 14 (Wednesday) to December 16 (Friday), 2022.

  • Seminar・Event

We will be exhibiting at "SEMICON Japan 2022," which will be held at Tokyo Big Sight from December 14 (Wednesday) to December 16 (Friday), 2022. At this exhibition, we will showcase SE motors designed for equipment requiring an accuracy of 1nm. Additionally, a technical representative from Nanomotion will be available at our booth to provide explanations. Please take the opportunity to experience the ultrasonic motors (piezo motors) from Nanomotion, which has over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments, along with the range of stage products equipped with these motors. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "SE Motor" (Demo available) ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) We sincerely look forward to your visit.

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工苑

工苑

Industrial Electrical Equipment

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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.

Product/Service List (39)

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KN_【SEMICON Japan 2021】 About Exhibited Products
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NM_【Adopted by domestic semiconductor manufacturing companies】 Vacuum-compatible ultrasonic motor
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High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment.
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