We detect arcs with a resolution of 1 microsecond, contributing to improved yield. It is also optimal as a pulse monitor.
- Monitor the fluctuations of current and voltage with a high resolution of 1 microsecond and detect anomalies. - Can be easily installed between the RF power supply and the matching box. - Communication is possible via Ethernet Net (CAT) and other means.
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basic information
It is optimal for arc detection and pulse monitoring in mass production environments such as etching equipment, CVD, and sputtering.
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We have a proven track record as pulse monitors and arc detectors for etching equipment, CVD, sputtering, etc., in the mass production environment of semiconductor foundries.
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Company information
Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.