Suitable for plasma monitoring such as etching, sputtering, and CVD!
The compact spectrometer manufactured by Ocean Optics is chosen by many customers to acquire the plasma emission spectrum in real-time within the chamber. Monitoring the plasma characteristics derived from these emission spectra is suitable for plasma-based process control in semiconductor manufacturing, among other applications. The "Plasma Monitor" can be configured with spectrometers and related accessories, including the standard model FLAME, the high-resolution model HR4000, or the buffering-compatible UV high-sensitivity model OCEAN HDX. It also supports mass production and custom applications, such as integration into semiconductor manufacturing equipment. 【Features】 ■ Supports wideband spectrum measurement ■ High wavelength resolution ■ Easy connection via optical fiber ■ User-friendly software OPwave+ (customizable) *For more details, please refer to the PDF materials or feel free to contact us.
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【Lineup】 ■ Fiber Multi-Channel Spectrometer Flame ■ High-Resolution Fiber Multi-Channel Spectrometer HR4000 ■ High-Speed Data Acquisition and Buffering Spectrometer OCEAN FX ■ High-Resolution Buffering Spectrometer OCEAN HDX ■ Electron-Cooled Back-Illuminated High S/N Fiber Multi-Channel Spectrometer QEPro ■ Various Other Accessories *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We offer a wide range of cutting-edge products from manufacturers around the world, centered on light measurement devices, and we respond to our customers' needs with a powerful lineup. We provide detailed counseling and prepare products tailored to each customer's environment. Furthermore, we go beyond merely introducing products; we create high satisfaction for our customers by proposing system configurations that match their situations and objectives. "When you want to do ●●" or "When ●● is having trouble with △△." In such cases, please feel free to consult us. At Ocean Photonics, we leverage the knowledge and experience we have cultivated over many years to fulfill our customers' aspirations.