Measuring displacement, deformation, and vibration with nanometer precision. Compatible with ultra-high vacuum and high magnetic fields. Maximum operating distance of 5 meters. Compatible with a wide range of materials.
Attocube's laser interferometric displacement sensor is a device that measures the variations in linear motion of objects. It can measure the displacement of objects with various materials and shapes over a wide range, from a few millimeters to several meters. It is a compact modular system that can be configured for up to three axes. The position signal can be used as a feedback signal for closed-loop positioning systems. It contributes to achieving advanced quality control (QC) and quality assurance (QA) through measurements of rotational fluctuations, vibration measurements, and calibration of machine tools. 【Features】 ■ Pico-order resolution ■ Wide operating distance range: from a few millimeters to a maximum of 5 meters ■ Capable of high magnetic field and ultra-high vacuum applications ■ Modular setup ■ Ultra-compact sensor head ■ Configurable for 3 axes (X, Y, Z) *For more details, please contact us or refer to the PDF download.
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basic information
Maximum number of sensor axes: 3 Operating distance (WD): 0...5000 mm (varies by sensor head) Sensor resolution: 1 pm Target speed: up to 2 m/s Measurement bandwidth: 10 MHz *For more details, please contact us.
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Applications/Examples of results
【Field】 Lab tests, beamline, vibration measurement, calibration applications, wafer & mask inspection, closed-loop motion control, accuracy evaluation, positioning applications in special environments 【Examples of Implementation】 - Semiconductor manufacturing (dynamic motion control of wafer stages, beam alignment in measurement and inspection, wafer flatness measurement, positioning of beam apertures and filters in lithography and measurement processes, ultra-precise position tracking in photolithography) - Machine tools (ultra-precise inline travel real-time characteristic control using stage guides, volumetric correction of machine tools and CMMs, sensor integration for motion capture, motion tracking of coordinate measuring machines, vibration analysis and correction) - Photonics (ultra-precise fiber positioning, beam steering, high-resolution microscopy)
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| Model number | overview |
|---|---|
| IDS3010 | This is a compact modular laser interferometric displacement sensor. |
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Company information
Nihon Laser, founded in 1968, is the oldest and largest specialized company in Japan for lasers and optical-related products, having grown alongside advancements in laser technology with the support of our customers as a pioneer in the laser trading industry. We allocate just over 10% of our workforce to engineers, making us a trading company with strong technical expertise. We provide excellent laser products and optical-related products from around the world, including the USA, UK, Germany, France, Switzerland, Denmark, and Lithuania. We have established agency agreements with top-class manufacturers in each country, and currently, we have about 50 overseas trading partners. Additionally, we can independently assemble laser-related equipment sourced from around the world and offer it as application systems. While we are a trading company, we also provide services akin to a fabless manufacturer. With gratitude for our customers' demands, we will continue to offer flexible and aggressive solutions.