Compatible with large GaAs and various wafers up to 2, 3, and 4 inches! Microscope loader equipment.
The "SYAR110" is a microscope loader device consisting of a tabletop robot and an illumination observation unit, along with a microscope stage. The illumination observation unit allows for macro observation of the wafer surface. It accommodates various wafers, starting with large GaAs wafers ranging from 2 to 4 inches. 【Features】 ■ Extracts wafers from the cassette and supplies them to the microscope stage ■ Supports various wafers, including large GaAs wafers ranging from 2 to 4 inches ■ Equipped with a laser-type mapping sensor ■ Features a PVC cover and various interlocks *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■LED/MEMS/Power Device Field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."