Introducing a compact tabletop type device that can add automatic transport functionality to existing microscopes!
This product is a compact tabletop device that can add an automatic transport function to existing microscopes. It supplies and retrieves wafers on the microscope stage. The wafer replacement is automatically performed by moving the microscope stage to a designated position. If the microscope has a control system, it can also be linked as a higher-level system. 【Features】 ■ Compatible with 5 and 6-inch wafers ■ Can add an automatic transport function to existing microscopes ■ A device that supplies and retrieves wafers on the microscope stage ■ Wafer replacement is automatically performed by moving the microscope stage to a designated position ■ If the microscope has a control system, it can be linked as a higher-level system (optional) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Single-arm robot ■ Aligner ■ Control equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."
