Introducing a sheet-type ion milling device capable of controlling high and low rate etching.
The "IML Series" is a sheet-type ion beam milling device that processes from cassette to cassette. It allows for high-rate etching and low-rate control. Additionally, devices with two processing chambers are also available. We offer free initial sample processing tailored to your application. For inquiries regarding wafer sizes, processing quantities, and more, please contact us. 【Features】 ■ High-rate etching and low-rate control are possible ■ Filamentless μ-wave neutralizer (optional) ■ EPD (endpoint detector) installation (optional) ■ Reactive gas compatibility (optional) ■ Filamentless RF bucket-type ion source (optional) *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Lineup】 ■IML-5-1 ■IML-6-1 ■IML-8-1 ■IML-8-2 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Microfabrication of MEMS electrodes, wiring and electrode processing for high-frequency filters and compound semiconductors, and fine pattern/shape processing for magnetic heads and magnetic sensors, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
The corporate philosophy aims to be a company that is "trusted" by all stakeholders, and through business activities based on "value creation" using high-tech solutions, it contributes to the progress and development of society. Currently, we are engaged in global business development across five segments: "Electronic Device Systems," "Finetech Systems," "Scientific and Medical Systems," "Industrial and IT Systems," and "Advanced Industrial Materials." We will also organically integrate "trading company functions" and "manufacturing functions" to respond to our customers' needs as an advanced technology company.