Observation of the cross-sectional shape of the resist pattern.

Multiple patterns of cross-sectional shapes with a wide range (approximately 3mm wide) can be observed in high detail!

We would like to introduce our "Observation of Resist Pattern Cross-Sectional Shapes." In the evaluation of the quality of resist patterns formed in complex three-dimensional shapes, we utilize ion milling technology equipped with a sample cooling mechanism and a three-axis ion source to perform cross-sectional processing without damage on heat-sensitive resist pattern samples. This allows for high-resolution observation of the cross-sectional shapes of multiple patterns over a wide area (approximately 3mm in width). Please feel free to contact us when you need our services. 【Features】 - By using a three-axis ion source, we can achieve a wider processing width compared to a one-axis type, allowing for the examination of cross-sectional shapes of multiple patterns. - Processing while cooling prevents damage to the resist. - By processing from different directions with varying shapes, it is possible to confirm each cross-sectional shape. *For more details, please download the PDF or feel free to contact us.

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