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  6. Small Ion Beam Milling Device "IM Series"

Small Ion Beam Milling Device "IM Series"

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last updated:Sep 02, 2019

日立ハイテク
日立ハイテク
  • Official site

Introducing a compact ion milling device that allows for a variety of rich chucking methods.

The "IM Series" is a compact ion beam milling device suitable for research and development as well as small-scale production. It has a compact footprint and is equipped with an endpoint detection system (optional for load lock). We offer free initial sample processing tailored to your application. Please contact us for information regarding wafer sizes, processing quantities, and more. 【Features】 ■ Capable of high-rate etching and low-rate control ■ Rotating and tilting wafer holder ■ A variety of chucking methods available ■ Compact footprint ■ Equipped with an endpoint detection system (optional for load lock) ■ Filamentless μ-wave neutralizer (optional) *For more details, please refer to the external link or feel free to contact us.

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2019-09-02_09h49_57.png

Small Ion Beam Milling Device "IM Series"

2019-09-02_09h49_57.png
2019-09-02_09h49_57.png
  • Related Link - https://www.hitachi-hightech.com/jp/

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basic information

【Lineup】 ■IM-150 ■IM-200 ■IM-250 *For more details, please refer to the external link or feel free to contact us.

Price range

Please contact us for details

Delivery Time

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Applications/Examples of results

【Applications】 ■ For electronics devices, MEMS manufacturing, microfabrication research, development, prototyping, and small-scale production purposes ■ Ion irradiation for small three-dimensional solid objects, etc. *For more details, please refer to the external link or feel free to contact us.

Company information

日立ハイテク

日立ハイテク

Industrial Machinery

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The corporate philosophy aims to be a company that is "trusted" by all stakeholders, and through business activities based on "value creation" using high-tech solutions, it contributes to the progress and development of society. Currently, we are engaged in global business development across five segments: "Electronic Device Systems," "Finetech Systems," "Scientific and Medical Systems," "Industrial and IT Systems," and "Advanced Industrial Materials." We will also organically integrate "trading company functions" and "manufacturing functions" to respond to our customers' needs as an advanced technology company.

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