A good film thickness distribution can be obtained! Customizable load-lock coating equipment.
We would like to introduce our "Load Lock Type FCVA Device." The load lock method improves membrane stability and suppresses particle adhesion. It is used by major lens manufacturers as a device for forming release films for glass lens molds. The substrate rotation mechanism allows for a good film thickness distribution. It is possible to combine elemental technologies such as "FCVA Carbon Source," "FCVA Metal Source," "Ion Beam," and "Sputtering" into a single device. 【Features】 ■ Load lock method ■ Improves membrane stability and suppresses particle adhesion ■ Good film thickness distribution achieved through substrate rotation mechanism ■ Customizable *For more details, please feel free to contact us.
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Our development technology has obtained international patents and plays a significant role in society. The super DLC (hydrogen-free ta-C film) produced by the FCVA method is formed through a completely different process compared to DLC films generated by existing PVD and CVD methods. Additionally, there is a composite metal film called "Micc film" that excels in release properties between metals and plastics. Coating films produced by the FCVA method are currently being rapidly adopted in fields such as the hard disk industry, precision machinery industry, and semiconductor industry, and future expansion into the automotive industry, nanoimprint industry, and biomaterials field is anticipated.