Adopting a self-rotation type sample holder! Customizable batch-type large coating equipment.
We would like to introduce our "Batch-type FCVA Device." It is effectively used for film formation on sliding parts such as automotive components and printer parts. It demonstrates a uniform film thickness distribution thanks to the self-rotating sample holder. 【Features】 ■ Adoption of a self-rotating sample holder ■ Customizable ■ Contributes to improved productivity *For more details, please feel free to contact us.
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【Configuration Example】 ■FCVA Sources: 6 units ■Sputter Sources: 2 units ■Ion Beam: 1 unit 【Chamber Size】 ■φ1000 x 600 in height ■φ1200 x 1000 in height ■φ1500 x 1500 in height *For more details, please feel free to contact us.
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Our development technology has obtained international patents and plays a significant role in society. The super DLC (hydrogen-free ta-C film) produced by the FCVA method is formed through a completely different process compared to DLC films generated by existing PVD and CVD methods. Additionally, there is a composite metal film called "Micc film" that excels in release properties between metals and plastics. Coating films produced by the FCVA method are currently being rapidly adopted in fields such as the hard disk industry, precision machinery industry, and semiconductor industry, and future expansion into the automotive industry, nanoimprint industry, and biomaterials field is anticipated.
![[Example] Preventing metal migration due to moisture in multilayer printed circuit boards.](https://image.mono.ipros.com/public/product/image/984/2000640006/IPROS21370121225881087240.jpeg?w=280&h=280)
