Introducing a device that can transport 8-inch wafers without coming into contact with the central part of the wafer!
This product is a device that can add automatic transport functionality to various standalone wafer measurement instruments. It can transport wafers without contacting the central part of the wafer using an edge grip hand. It can also transport wafers with warpage up to 2mm and can flip the wafer to transport both sides. Additionally, it can be linked with a measurement system as a higher-level system. 【Features】 ■ Compatible with 8-inch wafers ■ Can add automatic transport functionality to various standalone wafer measurement instruments ■ Can transport wafers without contacting the central part using an edge grip hand ■ Can transport wafers with warpage up to 2mm and flip them to transport both sides ■ Can be linked with a measurement system as a higher-level system *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Double Arm Robot ■ Aligner ■ Inversion Unit ■ Wafer Mapping Mechanism for Warping ■ Control Equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."