High-precision reduction-type multi-segment lenses enable the irradiation of low-speed ion beams with high current density.
This product is a decelerated cold cathode ion gun that can be used in ultra-high vacuum with beam energy ranging from 10 eV to 3000 eV. It efficiently extracts ions and, with a high-precision decelerated multi-stage lens, can irradiate a low-speed ion beam with high current density. The filament-free structure allows for the use of reactive gases and enables shorter maintenance cycles due to its long lifespan. It features a newly designed discharge chamber that excels in maintainability. Additionally, the high-efficiency differential exhaust design keeps the main chamber at ultra-high vacuum levels. 【Features】 - Decelerated cold cathode ion gun - Capable of irradiating low-speed ion beams with high current density - Filament-free structure allows for the use of reactive gases - Enables shorter maintenance cycles due to long lifespan - Newly designed discharge chamber with excellent maintainability *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■ Beam Energy: 10 eV to 3000 eV ■ Beam Current: 20 nA to 1.9 μA ■ Beam Diameter (Half Width): φ0.15 mm to φ5 mm ■ Maximum Average Current Density: 6.94 mA/cm² ■ Minimum Operating Pressure: 5.5×10^-6 Pa or lower ＊ Base Pressure of Main Chamber: 1.87×10^-6 Pa under non-bake conditions ＊ When drawn with one TMP 50 L/s at a single differential exhaust point ■ Differential Exhaust Port: ICF70 ■ Ionization Gases: Ar, He, Nitrogen, Oxygen, Hydrogen, (Please consult us for reactive gases such as SiF4, HC, etc.) * For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Ion beam sputtering ■ Surface soft landing (oxygen, etc.) ■ Low-energy cleaning ■ Insulator cleaning ■ Fuel cells (nitrogen doping, etc.) ■ Low-speed ion scattering spectroscopy (He) *For more details, please refer to the PDF document or feel free to contact us.
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Our company's sales policy is based on the following three pillars: - Contributing to the realization of researchers' "dreams" and "thoughts" through assistance in advanced and unique fundamental research. - Providing and maintaining high-performance vacuum experimental equipment, primarily consisting of high-performance electron guns and high-performance ion guns, tailored to meet our customers' needs, thereby contributing to research and development. - Applying these fundamental technologies to develop original products from OmegaTron, contributing to a wide range of industries and research and development sectors.