Introducing dry etching equipment compatible with piezoelectric materials and magnetic materials!
At Hitachi High-Tech, we handle "Ion Milling Equipment." We offer a lineup that includes the "Diffusion Beam Milling System," which allows for large-area processing with a small-diameter electrode, and the "R&D Compact Milling System," which is specialized for experimental development. With our extensive experience, we support our customers from development onward. 【Features】 <Diffusion Beam Milling System> ■ Large-area processing possible with a small-diameter electrode ■ Simultaneous processing of all six φ100mm wafers ■ Achieves good in-plane uniformity with a self-rotating wafer holder *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 <Small Milling Device for R&D> ■ Standalone device specialized for experimental development ■ Compact design that integrates electrical systems and power supply into one unit ■ Compatible with wafers up to φ75, φ100, and φ125mm ■ Includes substrate cooling, substrate potential neutralization function, substrate rotation, and stage tilt *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The corporate philosophy aims to be a company that is "trusted" by all stakeholders, and through business activities based on "value creation" using high-tech solutions, it contributes to the progress and development of society. Currently, we are engaged in global business development across five segments: "Electronic Device Systems," "Finetech Systems," "Scientific and Medical Systems," "Industrial and IT Systems," and "Advanced Industrial Materials." We will also organically integrate "trading company functions" and "manufacturing functions" to respond to our customers' needs as an advanced technology company.