Equipped with a spin cleaning unit that uses functional water! Adoption of a cleaning solution and cleaning method that replaces RCA cleaning solution.
The "WULF Series" is a spin-type cleaning device designed for high-resolution photomasks. Equipped with a spin cleaning unit that uses functional water, it can remove organic substances, metal ions, and foreign particles down to detection limit levels through centrifugal force from the workpiece rotation, ozone water, and ammonia-added hydrogen water discharge. Additionally, by switching between various cleaning solutions, it rapidly removes impurities deposited on the workpiece while also providing a safe environmental tool for waste liquid management. 【Features】 ■ Contributes to high cleanliness and improved yield ■ Capable of removing organic substances, metal ions, and foreign particles down to detection limit levels ■ Rapidly removes impurities deposited on the workpiece while also providing a safe environmental tool for waste liquid management ■ Adoption of cleaning solutions and methods that replace RCA cleaning solutions ■ Equipped with a spin cleaning unit that uses functional water *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■Rapid diffusion of cleaning solution onto the cleaning surface ■Quick removal of foreign substances and reaction byproducts ■Watermark-free drying *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Amaya Manufacturing Co., Ltd. has been developing and selling atmospheric pressure CVD (Chemical Vapor Deposition) equipment since 1970, focusing on atmospheric pressure CVD systems used for semiconductor manufacturing. In recent years, as a challenge to enter new fields, we have developed and sold high productivity atmospheric pressure CVD equipment for solar cell manufacturing. Moving forward, we will continue to work on developing new technologies and aim to be the only company specializing in atmospheric pressure CVD equipment.