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  5. Resist Device
  6. Exhaust gas treatment system (scrubber) for semiconductor manufacturing equipment

Exhaust gas treatment system (scrubber) for semiconductor manufacturing equipment

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last updated:Feb 13, 2026

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By installing an indoor scrubber that corresponds to exhaust gas and airflow, a safe operating environment can be achieved even in places without exhaust gas treatment facilities.

- It can be installed in accordance with devices such as etching and cleaning equipment. - Gases such as acids and alkalis are treated appropriately. - By properly processing with a scrubber, there is no impact on the ducts and equipment in the subsequent processes. Additionally, even if exhausted outdoors, there are no concerns for the surrounding environment or human health. *For more details, please download the PDF (catalog) or feel free to contact us.*

    Resist Device
P30_排ガス処理装置.png

Exhaust gas treatment system (scrubber) for semiconductor manufacturing equipment

P30_排ガス処理装置.png
P30_排ガス処理装置.png
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basic information

【Features】 Properly handles gases such as acids and alkalis. By appropriately treating them with a scrubber, there is no impact on the ducts and equipment in subsequent processes. Additionally, even when discharged outdoors, there are no concerns for the surrounding environment or human health. Scrubber: Neutralizes and discharges volatile gases generated from chemical solution tanks and other sources using a scrubber.

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Exhaust gas treatment device (scrubber)

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Industrial Machinery

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Walking hand-in-hand with customers, challenging for creation of new values across a wide range of fields– DALTON’s existence, with the dual business domains of laboratory equipment and industrial machinery, truly shines as we play the role of a partner to customers who have strong passion for creating new values. A long with our unique group firms and suppliers, we have built a long history of trust with our customers who’ve been the main players to create new values insociety. -Creating new values together.- Dalton Group are pooling our knowledge and technology together, merging it with our customers’creative endeavors to create new and innovative values that contribute to an affluent society and abright future.

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