It is a high-precision mass flow controller compatible with EtherCAT.
Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.
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basic information
○ Digital mass flow controller for digital interfaces (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Single power supply operation of +11 to 24V DC ○ Compatible with various surface mount standards (SEMI STD.) ○ Utilizes Rintech's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra high performance, 1.125-inch width ○ Compatible with surface mount gas interfaces
Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.