Absolute density measurement of fluorine radicals using vacuum ultraviolet absorption spectroscopy! Various applications for measurement as well.
The "SP-type RadiMo" is a device that can measure the absolute density of fluorine radicals in their ground state using absorption spectroscopy. The spectrum of the probe light emitted from the light source is calibrated with high precision. Additionally, it can measure in both emitting and non-emitting plasma. The F-RadiMo can be installed on the port of a process device for measurement. 【Features】 ■ Measurement of the absolute density of fluorine radicals ■ Capable of measuring in both emitting and non-emitting plasma ■ No calibration required for absolute density calculation ■ F-RadiMo can be installed on the port of a process device for measurement ■ Various measurement applications *For more details, please refer to the PDF document or feel free to contact us.
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【Radical Measurement Applications】 ■ Plasma Generation Radical Measurement - Etching Equipment: Low dielectric constant interlayer dielectric etching, silicon oxide film etching, silicon etching - Surface Treatment Equipment: Water-repellent film deposition, dielectric film, insulating film deposition - Chamber Cleaning: Silicon, tungsten ■ Downflow Plasma Generation Radical Measurement ■ Afterglow Plasma Generation Radical Measurement *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Since its establishment in 1991, KKE has received your generous support and cooperation, for which we are deeply grateful. Before the founding, I dedicated myself to technical operations. Drawing on what I learned during that time, KKE has grown together with all of you. Particularly, we have focused on "development, design, and manufacturing" in the field of vacuum technology without having standardized products, and we have had the pleasure of collaborating with industry, government, and academia. We have maintained a commitment to thoroughly engage in "development, design, and manufacturing" tailored to the specific requirements of our customers, making progress based on accurate judgments to meet their needs. Aiming to be a development-oriented company capable of responding to cutting-edge science and technology in the 21st century, we strive to contribute to society through "manufacturing" and to achieve happiness together with all of you. We look forward to your continued support for KKE.