This is the world's first ultra-compact radical absolute density measurement device that can be used in processes.
The Radimo Radical Monitor <Opposing Type Radical Monitor DP Type> is a monitoring device that measures atomic radicals in the gas phase generated during etching, surface treatment, and thin film production, enabling feedback into the process. It is the world's first ultra-compact radical absolute density measurement device that can be used in processes. It measures atoms present in the ground state in plasma using absorption spectroscopy, allowing for the selection of the optimal structure based on the measurement target and purpose. The measurement software is equipped with the latest calibration results from research conducted at Nagoya University’s Hori Laboratory. For more details, please contact us or refer to the catalog.
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【Features】 ○ Measurement of atomic radicals in the gas phase generated during etching, surface treatment, and thin film production ○ Monitoring device that enables feedback to the process ○ World's first ultra-compact radical absolute density measurement device usable in processes ○ Direct measurement of atomic radicals of hydrogen, nitrogen, and oxygen using vacuum ultraviolet absorption spectroscopy, allowing feedback to the process ○ Can be mounted on ICF70 flanges ○ Compatible with various plasma devices → EBEP treatment devices, CCP etching/CVD, Cat-CVD, ICP etching/CVD, etc. ○ System configurations such as vacuum exhaust system integrated control monitoring systems can be tailored to customer needs ● For more details, please contact us or refer to the catalog.
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Since its establishment in 1991, KKE has received your generous support and cooperation, for which we are deeply grateful. Before the founding, I dedicated myself to technical operations. Drawing on what I learned during that time, KKE has grown together with all of you. Particularly, we have focused on "development, design, and manufacturing" in the field of vacuum technology without having standardized products, and we have had the pleasure of collaborating with industry, government, and academia. We have maintained a commitment to thoroughly engage in "development, design, and manufacturing" tailored to the specific requirements of our customers, making progress based on accurate judgments to meet their needs. Aiming to be a development-oriented company capable of responding to cutting-edge science and technology in the 21st century, we strive to contribute to society through "manufacturing" and to achieve happiness together with all of you. We look forward to your continued support for KKE.
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