Semi-automatic prober compatible with microcurrent measurement and high-power measurement! It supports wafer sizes up to 8 and 12 inches, respectively.
-60℃ to +350℃ temperature characteristic evaluation, microcurrent measurement Compatible with power device measurements over 20kV and 200A ◎ A compact shield mechanism that can replace dry air prevents condensation even at negative temperatures. ◎ The compact shielding effect enables stable microcurrent measurements. ◎ The control software is user-friendly and excels in operability for operators. ◎ It can be equipped with automatic wafer alignment and automatic individual chip alignment utilizing image recognition. ◎ The control software is designed with icons arranged in process order to prevent operators from getting lost during operation, enhancing usability. ◎ It has a wafer alignment function that allows for angle adjustment and fine-tuning of XY positions using a model. ◎ After registering the die origin position, it features automatic detection of characteristic patterns through image processing, registering them as reference models. ◎ It is also possible to automatically align registered individual chips placed in a registered tray using image recognition. (Optional) ◎ It can be equipped with auto XYZ to accommodate wafer expansion, etc. (Optional)
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basic information
Please check the comprehensive catalog for details such as specifications.
Price range
P7
Delivery Time
Applications/Examples of results
Measurement of microcurrent IV (fA level) CV measurement High power measurement at 20kV/200A level High-frequency measurement Temperature characteristic testing in high and low temperature environments Reliability testing such as TDDB
Company information
We sell probe cards, manual probers, and hot chucks used for on-wafer measurements of semiconductor devices. We particularly offer products for high-frequency (RF), low current (low leakage), and high-temperature (thermal resistance) measurements. Please feel free to contact us with any inquiries or questions.
