Oxygen-free, high-efficiency wafer process! It is explained clearly using diagrams.
This document is about the "Vacuum EFEM" handled by Beck Co., Ltd. It includes the configuration of the Vacuum Load Port VLP, the configuration of the Vacuum EFEM, and numerous operations of the Vacuum EFEM, as well as the interaction between the Vacuum EFEM and process equipment. Additionally, it provides clear explanations using diagrams in color. Please feel free to download and read it. [Contents] ■ Configuration of the Vacuum Load Port VLP ■ Configuration of the Vacuum EFEM ■ Operation of the Vacuum EFEM: Loading of FOUP ■ Operation of the Vacuum EFEM: Vacuum evacuation of the port chamber and FOUP ■ Operation of the Vacuum EFEM: Wafer transport (Load/Unload) *For more details, please refer to the PDF document or feel free to contact us.
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【Other Descriptions】 ■ Completion of the vacuum EFEM operation process ■ N2 vent of the vacuum EFEM operation port chamber ■ Unloading of the FOUP in the vacuum EFEM operation ■ Vacuum EFEM and process equipment ■ Features of the vacuum EFEM *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Beck Co., Ltd. is a company that handles products such as the "Eco Back System," which exhausts the reservoir during the idling of vacuum pumps, "glove donning machines" for rubber gloves, and the high-efficiency vacuum system "Vacuum Server." Our company contributes to energy saving and productivity improvement in vacuum equipment.