Cleaning of carbon parts and removal of contaminants! We also offer degassing baking services when introducing new carbon.
Our company is engaged in a dry baking cleaning business using ultra-large, ultra-high-temperature chambers designed with a unique concept. We perform dry cleaning of carbon parts used in MOCVD equipment chambers at high temperatures, making them reusable and contributing to cost and waste reduction. The outgassing effect of the baking process enhances the quality stability of our customers' products. Additionally, we also conduct dry baking cleaning for III-N (GaN/InGaN/AlN) systems using a large dedicated chamber for cleaning quartz, SiC, and SiC-coated carbon parts, as well as removing contaminants. 【Features of the Dry Baking Cleaning Business】 ■ Cleaning and removal of contaminants from carbon parts ■ Contribution to cost and waste reduction ■ Improvement in the quality stability of our customers' products *For more details, please refer to the PDF materials or feel free to contact us.
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【Dry Baking Cleaning Features】 ■ Cleaning and removal of contaminants from quartz, SiC, and SiC-coated carbon parts ■ Established dry cleaning technology through extensive experimentation ■ Designed and implemented large chambers ■ Regeneration of quartz parts and sapphire substrates *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company provides maintenance services for MOCVD equipment, MBE equipment, and other related services, including precision cleaning and large-scale dry cleaning services using our unique special baking chambers. Our operations not only help our customers reduce operating costs but also contribute to the preservation of the global environment through waste reduction and the safe management and treatment of waste liquids.