A power supply designed to be compatible with existing electrostatic chucks, equipped with polarity reversal and automatic discharge functions.
The "PHV Series ESC Power Supply" features polarity reversal and automatic discharge functions, improving the chuck release characteristics of wafers. It is designed to be compatible with existing electrostatic chucks, is compact and lightweight, and incorporates low stored energy and current limiting to protect the process from surges and arcs. It is suitable for both Johnson-Rahbek and Coulomb-type ESC applications. 【Features】 ■ Designed for compatibility with existing electrostatic chucks ■ Compact and lightweight ■ Low stored energy ■ Equipped with polarity reversal and automatic discharge functions ■ Improves wafer chuck release characteristics *For more details, please refer to the attached PDF or feel free to contact us directly at 047-369-3389.
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【Lineup (Excerpt)】 ■ PHV-0110 ■ PHV-0110B ■ PHV-0205 ■ PHV-0110CT ■ PHV-0205CT ■ PHV-0303CT *For details, please refer to the attached PDF and feel free to contact us directly. 047-369-3389
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It is widely used as a method to fix silicon wafers in semiconductor manufacturing processes (PVD, CVD, ETCH).
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■ Repair and Upgrade We provide repair services for various power supplies, matching networks, phase shifters, and more. Based on our experience, knowledge, and track record, we not only repair the faulty components but also receive high praise for our proposals and improvements aimed at enhancing reliability, such as optimizing the parts used. For our repair and upgrade achievements and the main peripheral devices we support, please refer to the following link: http://www.pra.jp/repair-upgrade *For estimates or inquiries, please contact us directly at the phone number below or through our website link (contact form). 047-369-3389 http://www.pra.jp/contact