Adopts Au seal and piezo actuators! Compatible with various digital interfaces.
The "MC-7000 Series" is a high-speed response mass flow controller that achieves a response time of less than 200 msec with a thermal sensor. By adopting Lintec's unique self-temperature compensation method, it can handle corrosive gases and liquefied gases, ensuring a flow accuracy of ±1.0% S.P. It also supports various digital interfaces such as DeviceNet and EtherCAT. 【Features】 ■ Uses Au seals and piezo actuators ■ Achieves a response time of less than 200 msec with a thermal sensor ■ Adopts Lintec's unique self-temperature compensation method ■ Compatible with corrosive gases and liquefied gases ■ Guarantees flow accuracy of ±1.0% S.P. *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 ■MC-7100 ・Flow Range (N2 Equivalent): 5 to 5000 SCCM ・Valve Operation: Normally Closed ・Flow Control Range: 2 to 100% F.S. ・Required Differential Pressure: 50 to 300 kPa ■MC-7200 ・Flow Range (N2 Equivalent): 10, 20 SLM ・Valve Operation: Normally Closed ・Flow Control Range: 2 to 100% F.S. ・Required Differential Pressure: 100 to 300 kPa *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.