Easy operation, non-contact, rapid, high resolution, low-cost nano surface roughness and step shape measurement device. No vibration isolation table is required, making it possible for full inspection on the production line.
A compact surface roughness and shape measurement system that utilizes optical heterodyne interferometry, providing vibration resistance and high precision measurements with a height resolution of 0.1 nanometers. Measurement time can be significantly reduced, and it allows for full inspection on the production line without the need for an anti-vibration table. It is capable of extensive measurements and can be applied to multi-point measurements and large samples. <Main Features> 1) Significant reduction in measurement time at a low cost 2) High resolution with a height direction of 0.1 nanometers, maintaining compatibility with AFM 3) Simple measurements without the need for sample pre-treatment or vacuum, eliminating the need for an anti-vibration table 4) Capability for extensive measurements 5) External vibrations are canceled out through optical heterodyne interferometry, etc.
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basic information
Measurement method: Optical heterodyne interferometry Height resolution: 0.1 nm Reference height measurement range: 0.5 to 300 nm Reference measurement range: X-axis 45 mm, Y-axis 45 mm Roughness Ra: 0.1 to 50 nm, step height 1 to 150 nm Scratches, shapes, etc. Main unit dimensions: W 313 x D 614 x H 428 mm, weight 27 kg
Price range
P6
Delivery Time
※2-3 months
Applications/Examples of results
Electronics, semiconductors, automobiles, microtechnology, film, precision engineering, medical field, data storage, ceramics...
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We will contribute to research and development in various fields by introducing analysis and evaluation equipment and sensor systems based on cutting-edge technology from Europe and the United States to the domestic market. Additionally, we will provide flexible and reliable technical support to meet our customers' diverse needs. Please feel free to consult us, even about minor matters.