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  3. Measurement and Analysis
  4. Other measuring instruments
  5. Flow Meter
  6. Microflow Controller "Z3000 Model"

Microflow Controller "Z3000 Model"

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last updated:Jan 21, 2021

サーパス工業 本社
サーパス工業 本社
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Adopting a thermal flow meter for the flow meter! It is now possible to control a micro range of 1 to 25 mL/min.

The "Z3000 model" is a micro flow controller that combines a thermal micro flow meter and a motor valve. The valve unit and controller unit are integrated, allowing for installation in a small space. Additionally, a communication port is equipped on the side of the main unit, enabling confirmation of operational and alarm statuses through dedicated operation software. 【Features】 ■ Capable of controlling micro flow rates from 1 to 25 mL/min ■ Integrated valve unit and controller unit ■ Can be installed in a small space ■ LED indicators allow for checking power status, flow control status, and alarm status ■ Equipped with a communication port on the side of the main unit, enabling confirmation of operational and alarm statuses through dedicated operation software *For more details, please refer to the PDF document or feel free to contact us.

    Flow Metercontroller
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Microflow Controller "Z3000 Model"

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  • Related Link - https://www.surpassindustry.jp/%E8%A3%BD%E5%93%81/…

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【Specifications (Excerpt)】 ■Fluid: Pure water, chemical solution (fluids that do not corrode quartz glass) ■Flow rate range: 1 to 25 mL/min ■Connection type: W fitting ■Operating pressure range: 0 to 300 kPa ■Pressure resistance: 500 kPa ■Fluid temperature: 5 to 40℃ ■Ambient temperature: 15 to 35℃ *For more details, please refer to the PDF document or feel free to contact us.

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サーパス工業

サーパス工業 本社

Industrial Electrical Equipment

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Our company, based on the know-how accumulated in the field of liquid control using fluororesin and years of research and development, has launched over 3,000 proprietary brand products into the market with outstanding technology. These products have received high praise and trust from customers, ranging from semiconductor manufacturing to scientific instruments and medical devices. Please feel free to consult us if you have any requests.

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