By specifying the new collision calculation method, it is possible to perform calculations with cell sizes greater than the mean free path!
The "Neutral Particle DSMC Module (DSMCM)" is a module that uses the DSMC method (Discrete Simulation of Macroscopic Systems), which involves placing a large number of sample particles and probabilistically triggering collisions among them according to a physical model to track their behavior. It is designed to analyze the flow fields of rarefied gases within various vacuum devices. It is capable of analyzing the behavior of neutral particles (buffer gas, radical species, sputtering particles) that carry no charge within etching devices, thin film manufacturing equipment, and sputtering devices. Additionally, by specifying a new collision calculation method, it can also analyze viscous flow regions (Kn < 0.01). 【Features】 - In principle, it can analyze flow fields from free molecular flow to gas flow at atmospheric pressure. - Due to computational volume issues, it is effective for applying to low-pressure flow fields. - By specifying a new collision calculation method (U-system), calculations can be performed with cell sizes larger than the mean free path. - By coupling with PIC-MCCM or PHM, the behavior of radical species and sputtering particles can also be calculated rapidly using the test particle Monte Carlo method. *For more details, please refer to the PDF document or feel free to contact us.*
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【Function List (Partial)】 ■Application Areas: Rarefied gas flow within devices including vacuum equipment and pumps - Analysis of neutral particle gas flow under general rarefied gas conditions - Analysis of sputtering particle behavior (substrate deposition in sputtering devices) ■Modeling Method: Particle Method ■Analysis Method: DSMC Method and Test Particle Monte Carlo Method ■Target Dimensions: 2D (Cartesian coordinate system, axisymmetric coordinate system) ■Solver: Driver DSMCM / Module DSMCM ■Coordinate System: Cartesian (xy orthogonal) coordinate system / Cylindrical (rz orthogonal) coordinate system ■Mesh Shape: Orthogonal Mesh (variable pitch possible) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We are an independent company that aims to develop and sell software for analyzing physical phenomena in the fields of vacuum, plasma, rarefied gases, and gas electronics. We consider creativity, development capability, technical expertise, and competitiveness as our corporate spirit.