High-Temperature Constant Temperature Bath "Clean Oven" [For High-Temperature Processing of Semiconductor Wafers!]
A high-temperature constant temperature chamber suitable for high-temperature processing of semiconductor wafers, maintaining a high level of cleanliness with the HEPA filter inside the device!
The "Clean Oven" is a high-temperature constant temperature chamber using clean air. It is suitable for high-temperature processing of semiconductor wafers, maintaining a high level of cleanliness thanks to the HEPA filter inside the device. We can design detailed specifications such as changes in dimensions, operating temperatures, and the arrangement of operation switches to meet your usage conditions. 【Features】 ■ Maintains a high level of cleanliness due to the HEPA filter inside the device ■ Ideal for high-temperature processing of semiconductor wafers ■ Operation and temperature monitoring possible via a color touch panel arranged on the operation panel ■ Programmable operation is possible by adopting a programmable temperature controller * For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Structure (Excerpt)】 ■External dimensions: W1650×H900×D1400 (mm) ■Internal dimensions: W500×H500×D500 (mm) ■Operating temperature: +60 to +350℃ ■Temperature distribution: within ±2% ■Air intake and exhaust: operated by dampers *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Application] ■ High-temperature processing of semiconductor wafers *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company designs, manufactures, and sells various environmental testing equipment, focusing on constant temperature chambers. We conduct integrated production in-house, allowing us to create equipment tailored to our customers' specifications, unlike mass-produced or commercially available products. Additionally, we also build comprehensive lines that include wafer transport. Our specialized service staff will provide support even after installation, ensuring complete aftercare.
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