High-Temperature Constant Temperature Bath "Clean Oven" [For High-Temperature Processing of Semiconductor Wafers!]
A high-temperature constant temperature chamber suitable for high-temperature processing of semiconductor wafers, maintaining a high level of cleanliness with the HEPA filter inside the device!
The "Clean Oven" is a high-temperature constant temperature chamber using clean air. It is suitable for high-temperature processing of semiconductor wafers, maintaining a high level of cleanliness thanks to the HEPA filter inside the device. We can design detailed specifications such as changes in dimensions, operating temperatures, and the arrangement of operation switches to meet your usage conditions. 【Features】 ■ Maintains a high level of cleanliness due to the HEPA filter inside the device ■ Ideal for high-temperature processing of semiconductor wafers ■ Operation and temperature monitoring possible via a color touch panel arranged on the operation panel ■ Programmable operation is possible by adopting a programmable temperature controller * For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
basic information
【Structure (Excerpt)】 ■External dimensions: W1650×H900×D1400 (mm) ■Internal dimensions: W500×H500×D500 (mm) ■Operating temperature: +60 to +350℃ ■Temperature distribution: within ±2% ■Air intake and exhaust: operated by dampers *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
[Application] ■ High-temperature processing of semiconductor wafers *For more details, please refer to the PDF document or feel free to contact us.
catalog(2)
Download All CatalogsCompany information
Our company designs, manufactures, and sells various environmental testing equipment, focusing on constant temperature chambers. We conduct integrated production in-house, allowing us to create equipment tailored to our customers' specifications, unlike mass-produced or commercially available products. Additionally, we also build comprehensive lines that include wafer transport. Our specialized service staff will provide support even after installation, ensuring complete aftercare.


![Refrigeration-type constant temperature and humidity chamber [Can be used in combination with material testing machines!]](https://image.mono.ipros.com/public/product/image/b03/2000558143/IPROS75404819397169322764.jpeg?w=280&h=280)
![Rotating Constant Temperature Chamber [Equipped with a 3-tier rotating chamber for easy sample loading and unloading!]](https://image.mono.ipros.com/public/product/image/6ad/2000558163/IPROS15926404120833209940.jpeg?w=280&h=280)
![Large Constant Temperature and Humidity Chamber "Concrete Curing Chamber" [For Concrete Curing Tests!]](https://image.mono.ipros.com/public/product/image/0a8/2000558188/IPROS54760163297511113359.jpeg?w=280&h=280)
![LN2 Cooling Constant Temperature Bath [Can be used in combination with material testing machines!]](https://image.mono.ipros.com/public/product/image/0f6/2000558214/IPROS19907569436657995685.jpeg?w=280&h=280)





![[Patent] Achieving an air nozzle that completely removes water with air blow.](https://image.mono.ipros.com/public/product/image/4a3/2001469775/IPROS10759201048286602239.png?w=280&h=280)



![[Patent] Achieving an air nozzle that completely removes water with air blow.](https://image.mono.ipros.com/public/product/image/2116982/IPROS16998950562973190030.png?w=280&h=280)